ZG2-WDS22 PDF datasheet (datasheet)

Monitor the plasma light emission at 2 wavelengths.
To achieve a high precision, miniaturization, low price.
Easily realize the monitoring of etching and cleaning of the endpoints.
Monitoring of plasma etching, cleaning the light emitting.
By using the filter to detect the 2 wavelength, the realization of miniaturization, low price ZG2-WDS22 PDF datasheet. Optical system: Diffuse reflective; Regular reflective ZG2-WDS22
Measurement range: Height direction, 100±12 mm, 94±10 mm;
Width direction, 22 mm (typical).
Resolution: Height direction, 2.5 μm;
Width direction, 35 μm (22mm/631pixels).
ZG2 debut!
Achieving stable measurement.
through innovative technology. Classification: Standard.
Contact gap: G (0.5 mm).
Actuator: Panel mount plunger; High OP ZG2-WDS22 PDF datasheet.
Best-selling Basic Switch Boasting.
High Precision and Wide Variety.
A large switching capacity of 15 A with high repeat accuracy.
A wide range of variations in contact form for your selection: basic,
split-contact, maintained-contact, and adjustable contact gap types.
A series of standard models for micro loads is available.
A series of molded terminal-type models incorporating safety,
terminal protective cover is available ZG2-WDS22 PDF datasheet. Nozzle gap.
Optical system: positive and negative radiation.
Detection distance: 15 positive and negative 0.75mm.
Beam shape: linear beam.
Beam diameter: 900mm * 25 M.
Resolution: 0.25 M.
Cable length: 2m. Cable length: 9 m.
Quantity: 1.
For the most recent information on models that have been,
certified for safety standards, refer to your OMRON website. For the most recent information on models that have been,
certified for safety standards, refer to yoour OMRON website ZG2-WDS22 PDF catalog. Type: Cable with Connectors on Both Ends,
(one ferrite core provided, 30-dia × 39 mm).
Cable length: 15 m.
The highest level of ionization in its class.
Sensing and variable-AC system provides fast and meeticulous ionization ZG2-WDS22 PDF catalog.
Linked Ionizers cover a wide area without causing uneven ionization.
Digital ion display provides simple and reliable settings.