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Z5PM Series Plasma monitor
OMRON Z5PM Series Product information and technical parameters：
Brand: OMRON
Name: Plasma monitor
Model: Z5PM Series
Monitor the plasma light emission at 2 wavelengths.
To achieve a high precision, miniaturization, low price.
Easily realize the monitoring of etching and cleaning of the endpoints.
Monitoring of plasma etching, cleaning the light emitting.
By using the filter to detect the 2 wavelength, the realization of miniaturization, low price.
Amplifier Unit.
Separate Amplifier Sensor with.
Sensitivity Adjustment.
Compact design with smaller Sensor Head.
Heat-resistance model available for application between.
-10 and 200°C. High performance price ratio standard type proximity sensor.
Standard cable protector.
The new DC two-wire type Z5PM Series.
Non polar proximity sensor.
Type: DC / wire type.
Polarity: there.
Shape: non shield, M12 Z5PM Series
Detection range: 8mm.
Action mode: NC. Appearance: Shielded, 8 dia.
Sensing distance: 2.5 mm.
Model: Output configuration, NPN open-collector output; NO.
Subminiature Sensors with.
Long-distance Detection.
Shielded Sensor Heads from 3-mm to M12 diameters that,
can be embedded in metal.
Robotics cables provided as a standard feature (DC 2-Wire Models) Z5PM Series.
Indicator provided in Amplifier cable for easy confirmation of operation.
Power supply range of 5 to 24 VDC for DC 3-Wire Models. Size: M8(Stainless steel)(See note 2.); Double; Unshielded.
Sensing distance: 4 mm.
Connecting method (See note 1.): M8 Connector (3-pin).
Body length: Short.
Output configuration: PNP.
Operation mode NC.
A new generation in global applications Z5PM Series. Appearance: R-shaped.
Sensing method: Through beam type (with slot).
Connecting method: Connector model (4 poles).
Sensing distance: 5 mm (slot width).
Operating mode: Dark-ON/Light-ON (2 outputs).
Indicator mode: Incident light.
Model: PNP output.
Built-in connector enables,
downsizing and easier connection.
Protective circuit for safe operation.
A built-in connector minimizes the shape and dimensional,
requirements.
Two outputs: light-ON and dark-ON.
Complete lineup including seven different shapes.
Safer operation with built-in power supply reverse polarity,
protection.
Output overcurrent protection with a thermal shutdown,
circuit (patent pending).
The indicator can be seen from many directions to enable,
installation in more locations.
Connector with lock that mates with commercially available,
connectors. Sensor type: BGS (background suppression).
Sensing distance: 200 mm.
Connection method:: M12 connector Z5PM Series.
Model: PNP output.
A new generation in sensing performance.
Simplicity.
Simple selection.
Simple installation.
One family for all.
All standard applications covered.
A wide variety of models.
Models designed forr special applications Z5PM Series.
Non-stop detection.
High quality and reliability.
High EMC protection.
High light immunity.
Robust and waterproof housing.
Separate Amplifier Sensor with.
Sensitivity Adjustment.
Compact design with smaller Sensor Head.
Heat-resistance model available for application between.
-10 and 200°C. High performance price ratio standard type proximity sensor.
Standard cable protector.
The new DC two-wire type Z5PM Series.
Non polar proximity sensor.
Type: DC / wire type.
Polarity: there.
Shape: non shield, M12 Z5PM Series
Detection range: 8mm.
Action mode: NC. Appearance: Shielded, 8 dia.
Sensing distance: 2.5 mm.
Model: Output configuration, NPN open-collector output; NO.
Subminiature Sensors with.
Long-distance Detection.
Shielded Sensor Heads from 3-mm to M12 diameters that,
can be embedded in metal.
Robotics cables provided as a standard feature (DC 2-Wire Models) Z5PM Series.
Indicator provided in Amplifier cable for easy confirmation of operation.
Power supply range of 5 to 24 VDC for DC 3-Wire Models. Size: M8(Stainless steel)(See note 2.); Double; Unshielded.
Sensing distance: 4 mm.
Connecting method (See note 1.): M8 Connector (3-pin).
Body length: Short.
Output configuration: PNP.
Operation mode NC.
A new generation in global applications Z5PM Series. Appearance: R-shaped.
Sensing method: Through beam type (with slot).
Connecting method: Connector model (4 poles).
Sensing distance: 5 mm (slot width).
Operating mode: Dark-ON/Light-ON (2 outputs).
Indicator mode: Incident light.
Model: PNP output.
Built-in connector enables,
downsizing and easier connection.
Protective circuit for safe operation.
A built-in connector minimizes the shape and dimensional,
requirements.
Two outputs: light-ON and dark-ON.
Complete lineup including seven different shapes.
Safer operation with built-in power supply reverse polarity,
protection.
Output overcurrent protection with a thermal shutdown,
circuit (patent pending).
The indicator can be seen from many directions to enable,
installation in more locations.
Connector with lock that mates with commercially available,
connectors. Sensor type: BGS (background suppression).
Sensing distance: 200 mm.
Connection method:: M12 connector Z5PM Series.
Model: PNP output.
A new generation in sensing performance.
Simplicity.
Simple selection.
Simple installation.
One family for all.
All standard applications covered.
A wide variety of models.
Models designed forr special applications Z5PM Series.
Non-stop detection.
High quality and reliability.
High EMC protection.
High light immunity.
Robust and waterproof housing.
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